挪威标准,关于iso 14644-9 scp的标准NS-EN ISO 14644-9:2012 洁净室和相关受控环境 第9部分:按颗粒浓度对表面清洁度进行分类(ISO 14644-9:2012) 国际标准化组织,关于iso 14644-9 scp的标准ISO 14644-9:2022 洁净室和相关受控环境.第9部分:颗粒浓度的表面清洁度评定 ...
surfaces of equipment in a cleanroom and surfaces of materials in a cleanroom. Under consideration are all surfaces (external or internal) that are of interest. It provides guidance on the assessment of cleaning methods for achieving the required surface cleanliness by particle concentration (SCP)...