Hitachi_CDSEM_RecipeBuider SPECIFICATIONS ON DATA DEFINITION FILES FOR RECIPE BUILDER V15~ Please read through this manual carefully and then store it in a safe place. ? Before attempting operation, read the safety instructions and precautions carefully. ? Keep this manual in a safe place nearby...
日立HITACHI 4700 FE-SEM Manual说明书用户手册.pdf,日立HITACHI4700FE-SEMManual说明书用户手册用户手册产品说明书使用说明文档安装使用手册HITACHI 4700 FE-SEM COLD FIELD EMISSION 2 STARTING CONDITIONS 3-4 SPECIMEN LOADING 5 SAMPLE INSERTION 6-7 SAMPLE WITHDRAWA
The Hitachi Model S-6280 high resolution field emission Scanning Electron Microscope (SEM) is used at Motorola's MOS-12 facility for Critical Dimension (CD) measurements of less than 1 micrometer in size. This tool is used to measure 200-mm diameter wafers with a low accelerating voltage in...
SEMHitachiS4700UserManual：SEM日立s4700用户手册 SEM Hitachi S4700 User Manual General checks 1.Write “Date”, “User” and “Start time” on a user log 2.Check vacuum (IP1: 1.0 x 10-8 Pa, IP2: 1.0 x 10-7 Pa, IP3: 1.0 x 10-6 Pa, S.C.(Pe): L x 10-3 Pa, S.C....
SEM Hitachi S4700 User Manual General checks 1. Write “Date”, “User” and “Start time” on a user log 2. Check vacuum (IP1: 1.0 x 10-8 ..
1 Transfer software Automatic and/or manual transfer of measurement result files and image files from a CD-SEM to the Terminal PC. ✓ ✓ 2 Recipe evaluation software Displays performance and error information for each recipe in Excel® ✓ N/A 3 Recipe viewer software Displays all ...
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For the inspection, a critical dimension scanning electron microscope (CD-SEM) has hitherto been used widely. A dangerous or critically imperfect point on a semiconductor pattern to be inspected is observed as an evaluation point (hereinafter referred to as EP) with the SEM, so that various ...