Measurements are reported on the mechanical properties of high-aspect-ratio micromechanical structures formed using a conventional 0.5-碌m CMOS process. Composite structures are etched out of the CMOS dielectric, aluminum, and gate-polys... SC Lu,X Zhu,GK Fedder - 《Mrs Proceedings》 被引量: 55...
A novel process of high-aspect-ratio metallic microstructures is proposed. The process combines protective film coating, laser drilling, swelling of poly... CB Lin,MK Wei,CH Liu,... - Thirteenth International Conference on Micro Electro Mechanical Systems 被引量: 17发表: 2000年 Co3O4 Nanostruc...
High aspect ratio deep silicon etch techniques are a key enabling technology for implementing through silicon via structures and three-dimensional integration of multiple semiconductor substrates. State of the art deep silicon etch utilizes a time modulated etch process, which is typically referred to as...
This study demonstrates a highly stable, selective and sensitive uric acid (UA) biosensor based on high aspect ratio zinc oxide nanorods (ZNRs) vertical grown on electrode surface via a simple one-step low temperature solution route. Uricase enzyme was immobilized on the ZNRs followed by Nafion...
Both materials could be moulded using the same process window, therefore allowing for an understanding of replication and flash formation behaviour related to the actual material properties. The experiments examined the effects of four process parameters and four different aspect ratio 21, 30, 50, ...
United States Patent US6127278 Note: If you have problems viewing the PDF, please make sure you have the latest version ofAdobe Acrobat. Back to full text
a缺少这个方面的数据 Lacks this aspect the data[translate] a因为分手了我们就是陌生人了 Because has bid good-bye we is the stranger[translate] a为了在光纤光栅匹配解调系统中实现对光纤光栅微弱信号的检测与处理,在应用微弱光电信号检测原理的基础上设计一种高信噪比高检测精度的解调电路,该解调电路在光纤光栅...
13)N-type silicon substrate, N-MOS process,Not designed or rated as radiation hardened 14)Global shutter CCD sensor 1 . 2 Applications 1)Electronic still cameras, video capturing devices for PCs, etc 2)Pattern recognition 3) Industrial camera ...
Homogeneous high aspect ratio cellulose nanofibrils (CNFs) were prepared from Laminaria hyperborea (LH) seaweed cellulose without any initial mechanical, b
Laminated high-aspect-ratio microstructures in a conventional CMOS process Electrostatically actuated microstructures with high-aspect-ratio laminated-beam suspensions have been fabricated using a 0.8 μm three-metal CMOS process ... GK Fedder,S Santhanam,ML Reed,... - 《Sensors & Actuators A》 被...