High-aspect-ratioprocessesprovideameansforfabricatingmicromechanicalcomponentswithsmalllateraldimensionsincomparisonwiththeirthicknesses.LIGAisprobablythebest-knownmethodoffabricatinghigh-aspect-ratiostructures.LIGAProcess LIGAisanacronymderivedfromtheGermanwordsLithografie,Galvanik,Abformung,whichmeanslithography,...
Nanoridges with high aspect ratios of up to 28 and no residual layer were produced in Ormocers using the micromoulding into capillaries (MIMIC) process with subsequent ultraviolet-curing. This work presents and balances the different fabrication routes and the subsequent generation of working tools ...
10.1038/micronano.2017.17 High-aspect-ratio nanoimprint VJ Cadarso et al ab Nanostructures mask PMMA Silicon cd Combined micro and nanostructures mask ef 3 Figure 2 Schematic representation of a double cryo-etch process with one single PMMA layer depicted as follows: (a) Spin coating of the poly...
Interlayer dielectric structure with high aspect ratio process (HARP)The present disclosure provides a method of making an integrated circuit. The method includes forming a gate stack on a semiconductor substrate; forming a stressed contact etch stop layer (CESL) on the gate stack and on the ...
Conversely, a low aspect ratio promotes higher liquid/gas holdup and encourages interphase mixing. Therefore, low aspect ratio can reduce the fluid flow rate requirement and hence lower the process cost (Ochieng et al., 2003). It is therefore necessary to select the appropriate aspect ratio for...
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1)high aspect ratio高长径比 1.The result indicates that the growth of TiO2 nanotube arrays withhigh aspect ratiodepends highly on the nonaqueous solution which is enhanced by the applied potential and anodizing time.通过探讨阳极氧化工艺参数对纳米管形貌的影响,研究出高长径比TiO2纳米管阵列的制备工艺...
www.nature.com/scientificreports OPEN Solution Process Synthesis of High Aspect Ratio ZnO Nanorods on Electrode Surface for Sensitive received: 11 October 2016 accepted: 17 March 2017 Published: 18 April 2017 Electrochemical Detection of Uric Acid Rafiq Ahmad1, Nirmalya Tripathy2, Min-Sang ...
A process to form deep, vertical and high aspect ratio microstructures of solid as well as porous nature is presented. The process is capable of producing ... M Lindeberg,K Hjort - 《Microsystem Technologies》 被引量: 24发表: 2004年 Microfluidic active mixers employing ultra-high aspect-ratio...
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