This paper focuses on the steps we have taken to enable GridMapper~(TM), which is offered by ASML, as a method to reduce overlay error. The paper reviews the basic challenges of overlay error and previous standard correction practices. It then describes implementation of GridMapper into IBM'...
This paper focuses on the steps we have taken to enable GridMapper~(TM), which is offered by ASML, as a method to reduce overlay error. The paper reviews the basic challenges of overlay error and previous standard correction practices. It then describes implementation of GridMapper into IBM'...