Instance of the metrology object. Default value:'all' Suggested values:'all', 0, 1, 2 Resolution(input_control)real→(real) Distance between neighboring contour points. Default value:1.5 Restriction:Resolution >= 1.192e-7 Result If the parameters are valid, the operatorget_metrology_object_resu...
Index of the metrology object. Default value:0 Suggested values:'all', 0, 1, 2 Resolution(input_control)real→(real) Distance between neighboring contour points. Default value:1.5 Restriction:Resolution >= 1.192e-7 If the parameters are valid, the operatorget_metrology_object_model_contourreturns...