Extreme ultraviolet (EUV) lithography masksUS6984475 2003年11月3日 2006年1月10日 Advanced Micro Devices, Inc. Extreme ultraviolet (EUV) lithography masksUS6984475 * Nov 3, 2003 Jan 10, 2006 Advanced Micro Devices, Inc. Extreme ultraviolet (EUV) lithography masks...
Extreme ultraviolet (EUV) lithography is a soft X-ray technology, which has a wavelength of 13.5nm. Today’s EUV scanners enable resolutions down to 22nm half-pitch. In a system, an EUV light source makes use of a high power laser to create a plasma. This, in turn, helps emit a shor...
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Extreme ultraviolet (EUV) lithographic patterning methods are provided which implement a surface-hardened EUV resist mask to pattern features in multiple layers. A layer of EUV resist material is formed on a substrate. An EUV resist mask is formed by exposing and developing the layer of EUV resis...
The EUV lithography market is expected to reach USD 22.69 billion by 2029 from USD 12.18 billion in 2024, at a CAGR of 13.2% during the 2024-2029 period. The growing demand for advanced semiconductor devices with smaller nodes and higher performance, driven by applications in AI, 5G, IoT, ...
The report "Extreme Ultraviolet (EUV) Lithography Marketby Component (Light Sources, Optics, Masks, EUV Metrology, EUV Sensors, EUV Subassembly) and End User (Integrated Device Manufacturers (IDMs), Foundries) - Global Forecast to 2029" The EUV lithography market is expected to reach USD 22.69 ...
1) EUV extreme ultraviolet lithography 极端紫外平版印刷2) offset printing 平版印刷 1. The parameter of the dampening solution of offset printing and their function imprinting process were introduced as well as their measurement methods. 主要介绍把平版印刷的润版液参数要求及其在印刷过程中的作用,以及...
3. An optical train for an EUV lithography system, comprising: an extreme ultraviolet light source (602); a collector (604) for collecting EUV light created by the extreme ultraviolet light source and providing the light to a field faced mirror (608) of an illuminator system (606); the ill...
英文缩写 EUV 英文缩写EUV 英文全称extreme ultraviolet lithography 中文解释极端紫外平版印刷 EUV意思,EUV的意思,EUV是什么意思?爱站小工具网缩写频道为您提供有关于EUV的解释和缩写,极端紫外平版印刷的英文缩写是什么 其它解释 EUV(紫外光)
Extreme ultraviolet (EUV) lithography masks 专利名称:Extreme ultraviolet (EUV) lithography masks 发明人:Harry J. Levinson,Bruno M. LaFontaine,Ivan Lalovic,Adam R. Pawloski 申请号:US10699767 申请日:20031103 公开号:US06984475B1 公开日:20060110 专利内容由知识产权出版社提供 专利附图:摘要:An ...