PROBLEM TO BE SOLVED: To provide a highly accurate water-cooled electrostatic chuck module for semiconductor production system in which through leak is eliminated.TATENO NORIAKI建野 範昭MIYAJI ATSUSHI宮地 淳SAGO YASUMI佐護 康実IKEDA MASAYOSHI池田 真義KANEKO KAZUAKI金子 一秋...
Heating & Cooling Heating: Natural GasHas CoolingAir Conditioning: Refrigeration,Ceiling Fan(s)Has HeatingHeating Fuel: Natural Gas Fireplace & Spa Number of Fireplaces: 1Fireplace: 1 Fireplace, Family Room, GasSpa: NoneHas a Fireplace Windows, Doors, Floors & Walls Flooring: Carpet, Tile Levels...
An electrostatic chuck for holding a work by electrostatic forces, which has an electrostatic attraction body for attracting the work, an electrostatic conductive support body for supporting the electrostatic attraction body, channels for passing cooling medium therethrough and cover means for covering the...
CNC/High/Speed/Steel/Hardness/Capto/Milling/Drilling/Boring/Tool/Turning/Metal/Custom/Machine/Vdm/Internal /Cooling/Coated/Tungsten/Carbide/Threading/Cutter US$270.00-300.00 / Piece External/Cylindrical/Internal/Coordinate/Gear/Honing/Dia...
An electrostatic chuck for holding a wafer in a plasma processing chamber, the chuck including a pedestal having a top surface, an internal manifold for carrying a cooling gas, and a first plurality of holes leading from the internal man... Kenneth S. Collins,John R. Trow,Joshua Chiu-Wing...
Products name:CNC Holder HSK 63 Collet Chuck HSK40E HSK63A HSK63F HSK100A ER32 Arbor;Material:40Cr;Hardness:HRC56-58;Type:HSK63F ER Tool Holders;Precision:0.003mm;Balance:G2.5 25000rpm;Surface Roughness:Ra<0.005mm;Max run out:<0.005mm;Cooling:AD/AD+B;Pay
A chuck (6) with a retaining surface for retaining and cooling a test substrate is fixed on the carrier in such a manner that the chuck (6) is thermally uncoupled from the chuck (5) and connected with a cold head (23) of a refrigerator (24) by a good heat conducting connecting unit...
Flash cooling system is used for cooling of liquids, utilizing thermo compressors, steam ejectors or vacuum pumps. Tool wear of machine tools and large ... GH Reddy,M Aparna 被引量: 0发表: 0年 CHUCK FOR MACHINE TOOLS tensile feed (101) for machine tools, in particular turning machines, ...
The heat sink may have provisions for coolants and gas channels to feed a cooling gas to the backside of a wafer. The heat sink may have feed thrus to power the segmented electrodes in the electrostatic chuck. The passages for the feed thrus, gas feed holes and lift pins may be lined...
An electrostatic chuck for holding a wafer in a plasma processing chamber, the chuck including a pedestal having a top surface, an internal manifold for carrying a cooling gas, and a first plurality of holes leading from the internal man... Kenneth S. Collins,John R. Trow,Joshua Chiu-Wing...