cymer laser原理 Cymer激光器原理 激光器是一种产生激光光束的装置,它利用光学增强过程将输入能量转化为相干光。其中,Cymer激光器是一种常用的激光器。它采用的是放电等离子体产生激光的原理,具有高能量、高效率和高重复频率等优点。 Cymer激光器的核心部件是放电腔室。在放电腔室内,通过施加电场,使得气体分子激发到高...
上海汉玺电子科技为台湾知名CYMER laser 翻新厂家在中国内地授权代理商,所有的CYMER parts 均来自台湾翻新工厂,提供和原厂一样的warranty 服务。由台湾和中国内地分别提供专业的service 安装调试服务。 CYMER ® LASER SYSTEM ELS-5X00 ELS-6X00 翻新现场 测试现场...
Steve Leibson
摘要:据日经BP社报道,半导体曝光用激光光源大型厂商美国Cymer7月17日(美国时间)在“SEMICON West 2007”上宣布,曝光装置大型厂商荷兰ASML在EUV(Extreme UltraViolet,远紫外光)光刻设备的量产用光源上,采用了Cymer的LPP(Laser Produced Plasma,激光等离子体)技术。Cymer已与ASML签订了EUV光源供货的多年多台合同。最初的EU...
ASML acquired Cymer in 2013 to accelerate the development of extreme ultraviolet (EUV) semiconductor lithography. Based in San Diego, California, Cymer was founded in 1986 by two college friends Robert Akins and Richard Sandstrom to develop laser and lithography light source technology for the semicon...
-Cymer准分子激光器的工作原理及应用 ---Docin Choose ---豆 丁 推 荐 ↓ 精 品 文 档 The Best Literature---The Best Literature
Cymer准分子激光器的工作原理及应用
ASML acquired Cymer in 2013 to accelerate the development of extreme ultraviolet (EUV) semiconductor lithography. Based in San Diego, California, Cymer was founded in 1986 by two college friends Robert Akins and Richard Sandstrom to develop laser and lithography light source technology for the semicon...
Cymer Inc. of San Diego, a supplier of excimer laser light sources used in semiconductor manufacturing, and Japan-based Nikon, a provider of digital imaging, precision optics and photo technology, announced shipment of the 1000th laser light source in the companies’ 20-year partnership. The ...
20.A light source as recited in claim 12 wherein the system comprises a continuously pumped CO2laser device. 21.A light source as recited in claim 12 wherein the path is substantially linear. 22.An EUV light source comprising:a plurality of targets;a system generating laser pulses, the lase...