VELDHOVEN, the Netherlands, and SAN DIEGO, California (USA), 17 October 2012 - ASML Holding NV [ASML], a leading provider of lithography systems for the semiconductor industry, and Cymer, Inc. [CYMI], a leading supplier of lithography light sources used by chipmakers to manufacture advanced ...
Attorney, Agent or Firm: ASML CIP (San Diego) / DMIPG (Veldhoven, NL) Claims: I/We claim: 1. A laser light source comprising: a solid state seed laser system producing a seed laser output light pulse beam of pulses having a nominal center wavelength at a pulse repetition rate; a ...
Attorney, Agent or Firm: ASML CIP (San Diego) / DMIPG (Veldhoven, NL) Claims: I/We claim: 1. An apparatus comprising: a line narrowed pulsed excimer or molecular fluorine gas discharge laser system comprising: a seed laser oscillator producing an output comprising a seed laser output light...
ASML CIP (San Diego) / DMIPG (Veldhoven, NL) Claims: What is claimed is: 1.A method comprising:supplying pump energy to a gain medium of at least one optical amplifier of a gas laser system to cause a population inversion in the gain medium and to produce an amplified light beam, whe...
ASML CIP (San Diego) / DMIPG (Veldhoven, NL) Claims: I/We claim: 1.A laser output light beam pulse line narrowing mechanism comprising:a nominal center wavelength and bandwidth selection optic;a static wavefront compensation mechanism shaping the curvature of the selection optic;an active wave...
Hoffman, Jerzy R. (Montebello, CA, US) Application Number: 12/927012 Publication Date: 03/10/2011 Filing Date: 11/03/2010 Export Citation: Click for automatic bibliography generation Assignee: Cymer, Inc. (San Diego, CA, US) Primary Class: ...
Fomenkov, Igor V. (San Diego, CA, US) Application Number: 13/441639 Publication Date: 04/22/2014 Filing Date: 04/06/2012 Export Citation: Click for automatic bibliography generation Assignee: Cymer, LLC (San Diego, CA, US) Primary Class: ...
Publication Date: 04/29/2003 Filing Date: 05/10/1999 Export Citation: Click for automatic bibliography generation Assignee: Cymer, Inc. (San Diego, CA) Primary Class: 372/103 Other Classes: 372/27, 372/33, 372/108 International Classes: ...
Assignee: Cymer, LLC (San Diego, CA, US) ASML Netherlands B.V. (Veldhoven, NL) International Classes: G03B27/54; G03F7/20 Field of Search: 355/52, 355/55, 355/67-71 View Patent Images: Download PDF 9835959 US Patent References: 20170179677 ONLINE CALIBRATION FOR REPETITION RATE ...
Sandstrom, Richard L. (Encinitas, CA) Application Number: 10/141216 Publication Date: 02/17/2004 Filing Date: 05/07/2002 Export Citation: Click for automatic bibliography generation Assignee: Cymer, Inc. (San Diego, CA) Primary Class: