Cymer Cymer is an independently operated business within the ASML group that develops, manufactures and services deep-ultraviolet (DUV) light sources ASML acquired Cymer in 2013 to accelerate the development of extreme ultraviolet (EUV) semiconductor lithography. Based in San Diego, California, Cymer w...
The article cites a deal under which ASML Holding NV of Veldhoven, Netherlands will acquire San Diego, California-based lithography light sources provider Cymer Inc. for 2.5 billion U.S. dollars so that Dutch company could produce microchips with more functions at a lower cost.COLLINS...
Cymer is also working on HVM II, the successor to HVM I, on which the company has demonstrated 160W average power in open-loop testing at low duty cycle, using the pre-pulse technique. The company plans to begin integrating the first HVM II sources into ASML NXE:3300B scanners beginning ...
An DPP EUV source is disclosed which may comprise a debris mitigation apparatus employing a metal halogen gas producing a metal halide from debris exiting the plasma. The EUV source
50 liter/second. The exhaust flow is provided by a vacuum pump such as design blower backed by an Anect Iwata ISP-500 scroll pump available from Synergy Vacuum a Canadian company. This provides a pump speed of 40 liters per second. The xenon is fed into nozzle2through gas pipe4running ...
Cymer is an independently operated business within the ASML group that develops, manufactures and services deep-ultraviolet (DUV) light sources ASML acquired Cymer in 2013 to accelerate the development of extreme ultraviolet (EUV) semiconductor lithography. Based in San Diego, California, Cymer was fou...