了解它的process flow,画好版图TO就行了。不过如果需要开发一些单点工序,则需要留够时间和FAB安排相关的short loop实验,小流程跑通了再跑完整的process flow。这种需要和FAB有较多的磨合(钱也要砸进去不少)。具体的项目也不一样,没法统一说要怎么做,只能靠经验去把握了。但是一个重要的原则就是尽可能提前,因为...
CMOS Image Sensor Process Flow
BSI Process Flow A number of process steps are required to produce a CMOS image sensor using BackSide Illumination architecture. Diagrams describing two different BSI process flows, Si-Bulk (Figure 5) and SOI (Figure 6), are shown below: Fig. 5: BSI Si-Bulk Simplified Process Fig. 6: BSI...
A self-aligned silicide (salicide) process is used to form a local interconnect for a CMOS image sensor consistent with a conventional CMOS image sensor process flow. An oxide layer is deposited over the pixel array of the image sensor. Portions of the oxide layer is removed and a metal ...
CMOS image sensors are usually composed of image sensor cell array, row driver, column driver, timing control logic, AD converter, data bus output interface, control interface, etc. These parts are usually integrated on the same silicon chip. The working process can be divided into reset, ...
Manufacturing Process Flow• Wafer Fabrication Unit: Pixel Array, Logic Circuit, DRAM Circuit• CIS, BSI and TSV Process Flow Cost Analysis• Overview of the Cost Analysis• Supply Chain Deion• Yield Hypotheses• Wafer Cost Analyses: Pixel Array with Microlenses, Color Filters, and Spacer...
Abstract — In this paper, the current CMOS image sensor processing color filter and microlens process are deeply studied, and the flow and processing methods of the whole filter and microlens process are summarized. Although the process is quite difficult, planarization and microlens technology are ...
基于cmos图像传感器的彩色滤镜和微透镜工艺研究 图 1 像素阵列上的彩色滤镜史海军，上海集成电路研发中心测试技术部，研究方向：集成电路设计与制造。
process for the preparation of a CMOS image sensor exposure / development by proceeding to the after forming the bump, the microlens forming process, improve the uniformity of the micro lens, and the invention was easily to improve the properties and yield of the image sensor, the CD ...
We present a compact 1.3 × 4 μm2 Germanium waveguide photodiode, integrated in a CMOS compatible silicon photonics process flow. This photodiode has a be... Christopher,T.,DeRose,... - 《Optics Express》 被引量: 201发表: 2011年 Power efficient 4.5Gbit/s optical receiver in 130nm CMO...