Fig. 1: The overall design of the resonant high-pressure microsensor. a composite pressure-sensitive mechanism of diaphragm bending and volume compression; b schematic of multicavity all-silicon resonant high-pressure microsensor with dual resonators; and c excitation and pickup of a resonator Full ...
This paper presents a high-Q resonant pressure microsensor with through-glass electrical interconnections based on wafer-level MEMS vacuum packaging. An approach to maintaining high-vacuum conditions by integrating the MEMS fabrication p... Luo,Zhenyu,Chen,... 被引量: 21发表: 2014年 Design and Im...
Sensing the thermal conductivity of deteriorated mineral oils using a hot-film microsensor J. Kuntner, R. Chabicovsky, B. Jakoby Pages 397-402 Article preview Sorry, this component is empty. select article Fabrication of high temperature surface acoustic wave devices for sensor applications Research...
Micro- and nano-resonators have been studied extensively both for the scientific viewpoint to understand basic interactions at small scales as well as for applied research to build sensors and mechanical signal processors. Majority of the resonant micros
A wireless microsensor for monitoring flow and pressure in a blood vessel utilizing a dual-inductor antenna stent and two pressure sensors dimensions. A 0.5-渭m thick parylene layer provides electrical insulation. The integrated device is deployed inside a silicone mock artery with a standard ... ...
Recently, a prototype microsensor has been designed by the means of a specifically designed coupled optical-acoustic model. This paper discusses the new, or more intense, challenges faced if downscaling is continued. The first limitation in miniaturization is physical: the light source modulation, ...
Therefore, according to the requirement for technical application of internal real-time microscopic diagnosis to vanadium redox flow battery, this study proposes using micro-electro-mechanical systems technology to develop a flexible integrated (temperature and flow) microsensor embedded in the vanadium ...
In the following, \(Q_{1} = 2400\) and \(Q_{2} = 3480\) according to the simplified numerical tool56 proposed by the authors to compute fluid damping in MEMS resonant structures working in low pressure conditions such as in this case. Note that a nonlinear quality factor can in ...
Kieninger, J., Weltin, A., Flamm, H. & Urban, G. A. Microsensor systems for cell metabolism-from 2D culture to organ-on-chip.Lab Chip18, 1274–1291 (2018). ArticleCASPubMedGoogle Scholar Zhang, W., Guo, C., Jiang, K., Ying, M. & Hu, X. Quantification of lactate from variou...
20050028582Capped microsensor2005-02-10Schatz et al. 20030073292HERMETIC CHIP SCALE PACKAGING MEANS AND METHOD INCLUDING SELF TEST2003-04-17Bartlett et al. 6205846Method of determining with great accuracy the rate of leakage from the case of an electrical apparatus2001-03-27Dupraz et al.73/40 ...