loss[.Forinstance,inthevisibleandnearinfraredfrequencies,theplasmonicmodesinMIMwaveg— uidescanbesqueezedindeepsub—wavelengthscales[.However,theysuffer g reat ly f ro m oh m los ses and t heir pro pagat ion lengt hs ar e limit ed to a few micro ns ...
loss[.Forinstance,inthevisibleandnearinfraredfrequencies,theplasmonicmodesinMIMwaveg— uidescanbesqueezedindeepsub—wavelengthscales[.However,theysuffer g reat ly f ro m oh m los ses and t heir pro pagat ion lengt hs ar e limit ed to a few micro ns ...
Keywords:传感器;折射率;表面等离子体激元;金属–介质–金属波导 Sensor,Refractive Index,SPP,Metal-Insulator-Metal Waveguide Full-TextCite this paperAdd to My Lib Abstract: 本文提出并利用时域有限差分(FDTD)模拟了一种新型的金属–介质–金属(MIM)波导结构的表面等离子体传感器,该传感器由一个直主波导和一个共...
8.集成电路中“金属-绝缘体-金属”电容器结构的制造方法,包括下电极金属、上电极金属、上层互连金属、下电极金属与上电极金属之间的MIM介质、上电极金属与上层互连金属之间的绝缘介质以及上通孔的设置工序,其特征在于首先,下电极金属淀积之后,按照光照版图对其蚀刻,构成网格状和/或条形状的下电极金属,使之增加垂直方向...
介绍了一种基于原子层淀积(ALD)方法生长的高密度二氧化铪金属-绝缘体-金属(MIM)电容,获得的电容密度达到了9.76fF/μm2,漏电流在1V时处于～1...