A check valve,clack valve, non-return valve or one-way valve is a valve that normally allows fluid(liquid or gas) to flow through it in only one direction. Check valves are two-port valves, meaning they have two openings in the body, one for fluid to enter a...
in order to enable low-voltage measurements to be made in relation to the chuck assembly221, the connector mechanism231includes both a source line and a measurement line to provide Kelvin-type connections to the chuck assembly. In
Step 1 ofFigure 2corresponds to the pulsing of Mo(CO)6, which is stated as an instruction on line 11 of the recipe as “Pulse” of channel ‘2’ with a value of 0.02 s, which is the valve opening time for Mo(CO)6precursor flux to the ALD reactor. The ALD recipe ofTable 1uses...