In this review, we aim to provide a general overview of various aspects of vibrational modes in MEMS resonators. Vibrational eigenmodes are a type of solution to deformation problems in linear elasticity which give rise to a spatial and a temporal eigenvalue problem coupled by a common eigen...
Because the suspension beams cause complicated vibrational modes for higher frequencies, the enhancement of the Q-factor for high vibrational modes cannot be obtained here. At present, the tapered-anchor resonators are thought to be most suitable for frequency tuning applications. 展开 关键词: ...
关键词 MEMS / Electro-static driven micro-resonator / Elasto-suspending / Model of mechanics / Vibrational analysis 收藏 全部来源 求助全文 掌桥科研 相似文献 Characteristic modes of electrostatic comb-drive X-Y microactuat...
resonatorssmart materialsactuatorsWe have designed, fabricated and tested a balanced doubly suspended versatile, torsion and flexural, MEMS resonator structure. The doubly suspended structure has been used earlier for very precise high Q resonators but we wished to study the various vibration modes of ...
resonatorssprings (mechanical)vibrations/ 3D electret-based micropower generatorlow-level ambient vibrational energy harvestingmultiple vibration modesrotational symmetrical resonatorA novel three-dimensional (3D) electret-based micro power generator with multiple vibration modes has been developed, which is ...
The self-excited oscillation occurs when the eigenvalues are in the right half-plane. Figure 4. Numerical examples of the root locus when 𝛿𝑓𝑓δff varies from 0.1 to 6: (a) modes 1 and 2 are always unstable and stable, respectively; (b) multiple complex conjugate eigenvalues exist;...
The self-excited oscillation occurs when the eigenvalues are in the right half-plane. Figure 4. Numerical examples of the root locus when 𝛿𝑓𝑓δff varies from 0.1 to 6: (a) modes 1 and 2 are always unstable and stable, respectively; (b) multiple complex conjugate eigenvalues exist;...
Figure 6. The influence of the first harmonic ρ1 on the frequency split of n = 1, 2, 3 modes. The influence of the second harmonic error on the frequency split is shown in Figure 7. With the increase in the second harmonic error, the frequency split of the n = 1 mode increases...
TEM observations of buckling and fracture modes for compressed thick multiwall carbon nanotubes. Carbon 2011, 49, 206–213. [CrossRef] 60. Kuzumaki, T.; Mitsuda, Y. Nanoscale mechanics of carbon nanotube evaluated by nanoprobe manipulation in transmission electron microscope. Jpn. J. Appl. Phys...