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A new oil-free vacuum pump has been developing to substitute for the conventional oil-sealed rotary vacuum pumps. The pump is a four-stage positive displacement pump whose pumping unit consists of a special bellows, an inlet valve and an outlet valve. The shape of the bellows is based on ...
A new oil-free vacuum pump has been developing to substitute for the conventional oil-sealed rotary vacuum pumps. The pump is a four-stage positive displac... Y Murakami,J Yuyama - 真空 被引量: 0发表: 2003年 Development of an Oil-Free Vacuum Pump using a Unique Bellows A new oil-free...
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