AENOR UNE-EN ISO 14644-5:2005 洁净室和相关受控环境 第5部分:操作 (ISO 14644-5:2004) Cleanrooms and associated controlled environments - Part 5: Operations (ISO 14644-5:2004) 2005年
UNE-EN ISO 14644-8:2023洁净室和相关受控环境 第8部分:通过化学浓度评估空气洁净度(ACC) Cleanrooms and associated controlled environments - Part 8: Assessment of air cleanliness by chemical concentration (ACC) (ISO 14644-8:2022)首页 标准 UNE-EN ISO 14644-8:2023 ...
最新版本是UNE-EN ISO 14644-9:2022。
标准名称为《洁净室和相关受控环境 第10部分:按化学浓度分类表面清洁度》,标准号为AENOR UNE-EN ISO 14644-10:2014。该标准基于ISO 14644-10:2013,主要规定了洁净室及相关受控环境中表面清洁度的化学浓度分类方法,适用于需要严格控制表面污染物的行业。 ***此介绍可能不准确,请注意参考原文。
UNE-EN ISO 14644-9:2022洁净室和相关受控环境 第9部分:颗粒浓度表面清洁度评估 Cleanrooms and associated controlled environments - Part 9: Assessment of surface cleanliness for particle concentration (ISO 14644-9:2022)首页 标准 UNE-EN ISO 14644-9:2022 ...
洁净室和相关受控环境 第3部分:测试方法(ISO 14644-3:2005), Cleanrooms and associated controlled environments - Part 3: Test methods (ISO 14644-3:2005), 提供UNE-EN ISO 14644-3:2006的发
UNE-EN ISO 14644-2:2001的标准全文信息,洁净室和相关受控环境 第2部分:测试和监控规范 以证明持续符合 ISO 14644-1 (ISO 14644-2:2000), Cleanrooms and associated controlled environments - Part 2: Speci