To reduce down time associated with routine cathode replacement we developed a turret-type electron gun for our electron beam mask writer, EBM-8000. This enables us to exchange cathodes without venting the gun to atmosphere, thereby reducing the downtime for cathode replacement by 80% compared to...
To reduce down time associated with routine cathode replacement we developed a turret-type electron gun for our electron beam mask writer, EBM-8000. This enables us to exchange cathodes without venting the gun to atmosphere, thereby reducing the downtime for cathode replacement by 80% compared to...