Tin Mask.(Poem)Cheney, Colin
在Low-k材料被广泛应用后,TiN Hardmask薄膜因可以帮助在via/trench刻蚀后获得更佳的形貌,已成为不可或缺的关键工艺。根据这一需要,北方华创的exiTin H430 PVD系统应运而生。由北方华创自主研发,应用于28纳米工艺的exiTin H430 TiN PVD沉积系统具有独特的工艺控制技术,设备兼容性强,工艺稳定,颗粒表现佳,灵活的设...
GROWTH OF COPPER ZINC TIN SULFIDE NANO-RODS BY ELECTRODEPOSITION USING ANODIZED ALUMINUM AS THE GROWTH MASKGROWTH OF COPPER ZINC TIN SULFIDE NANO-RODS BY ELECTRODEPOSITION USING ANODIZED ALUMINUM AS THE GROWTH MASKChanC.P.LamH.LeungK.K.Surya...
日前,北方华创微电子氮化钛硬掩膜(HardMaskTiN PVD)设备在国内领军集成电路芯片制造企业生产线上完成14天快速装机,创世界纪录。2017年以来,中国集成电路产业持续高速增长,制造产能严重不足的问题越来越严重的困扰着领军集成电路代工厂。北方华创深谙客户需求,以关键设备HardMask TiN PVD的14天快速安装,给客户争取宝贵生产...
Daily Record (Glasgow, Scotland)
The composition uses peroxide as an oxidizing agent for removing a PVD TiN hard mask under weakly basic conditions. The composition comprises bulk or long-chain organic amine or polyalkylamine for improving removal/etching selectivity of PVD TiN to CVD TiN. Also, the composition additionally ...
A method to form a titanium nitride (TiN) hard mask in the Damascene process of forming interconnects during the fabrication of a semiconductor device, while the type and magnitude of stress carried by the TiN hard mask is controlled. The TiN hard mask is formed in a multi-layered structure...
The composition uses peroxide as an oxidizing agent for removal of the PVD TiN hard mask under weakly basic conditions. The composition comprises bulk or long chain organic amines or polyalkylamines to improve the removal/etch selectivity of PVD TiN versus CVD TiN. The composition further ...
Damascus curly figure is formed the invention discloses a kind of formation titanium nitride (TiN) hard mask and covers the interconnection of decorations method in the manufacture of semiconductor devices, and synchronic typological stress intensity controls TiN dura maters. The TiN hard masks are ...
National costumes in the villages: Kusici, Deretin, Maskova and Ravna Gora, belong to the old Vlach style, worn in all areas of the Ivanjica region. The inhabitants of this region are mainly migrants from the so-called Dinara region. In its basic characteristics the costume is similar to ...