SOLUTION: In a thin-film forming method, reaction gas molecules are supplied to a substrate 9 into a vacuum vessel 1, and a thin film is formed on the surface of the substrate 9. Inner pressure of the vacuum vessel 1 at the time of thin-film formation is set in a pressure range, ...
Thin-film patterning method, manufacturing method 优质文献 相似文献 参考文献 引证文献Manufacturing method of thin-film magnetic head and thin-film magnetic head A manufacturing method of a thin-film magnetic head includes a step of depositing an MR multi-layered film on a lower electrode layer, ...
In a thin-film deposition method, a substrate is placed in a heat chamber having a pressure equal to or higher than an atmospheric pressure, and the substrate is heated in the heat chamber by supplying gas having a temperature higher than a room temperature by forced convection. The heated ...
Making sol - gel is a special method rm anufacturing thin film. 溶胶— 凝胶法是制备薄膜的一种独特的方法. 互联网 Lin Yong Chang : Optics of Thin Film, Coating Techniques, Display Techniques. 林永昌: 薄膜光学, 薄膜技术, 显示技术. 互联网 ...
A method of rapidly forming a thin film of high quality through film formation by alternate feeding of raw gases. In particular, a method of forming a TiN thin film, comprising repeating operations including causing TiCl4 gas as a raw gas to be adsorbed on a substrate or TiCl4 molecules ...
Thin film transistor, method for manufacturing the same and display device comprising the same Provided are a thin film transistor, a method for manufacturing the same and a display device comprising the same. The thin film transistor includes a gate electrode which is formed on an oxide ...
Thin film transistor array panel and method for manufacturing the same, and liquid crystal display A thin film transistor array panel includes a substrate, a first thin film transistor formed on the substrate, a color filter formed on the first thin film... S Chang - US 被引量: 1发表: 20...
PURPOSE: A method for forming a thin film on a support member and a structure made by using the same are provided to perform the heat process on an assembly including a stiffener and a substrate. CONSTITUTION: A method for forming a thin film on a support member includes following steps. ...
PROBLEM TO BE SOLVED: To provide a thin-film transistor and IC card which utilize a change in a threshold voltage of the thin-film transistor of non-single crystalline semiconductor, a method for manufacturing the transistor and card, a write/read method and an electronic equipment. ;SOLUTION:...
Using a nonhuman animal undergoing the onset of an autoimmune disease, a method of constructing an antibody against a protein showing a high homology in amino acid sequence between the animal and humans. In particular, a method of constructing an antibody against glypican 3 (GPC3) using an MRL...