长寿命:TBP模块需要具有较长的使用寿命,以降低更换成本和提高设备利用率。 英文资料: ASML 4022.471.89251 TBP module is a special module of ASML used to support the TBP (Tool Barrel) components of extreme ultraviolet (EUV) lithography machines. The TBP module is an important component of the lithog...