surface chemistrysurface topographywear/ microelectromechanical systemsmicrotribologysurface engineeringsurface micromachineschemically active surfacesMicromachines, particularly surface micromachines, often include smooth and chemically active surfaces. Because the kinetic energies, start-up forces and torques involved ...
Surface chemistry and tribology of MEMS. Annu. Rev. Phys. Chem. 55, 35–54 (2004). Article CAS Google Scholar Kolasinski, K. W. The mechanism of Si etching in fluoride solutions. Phys. Chem. Chem. Phys. 5, 1270–1278 (2003). CAS Google Scholar Higashi, G. S., Becker, R. S...
Surface engineering and microtribology for microelectromechanical systems and surface chemistry modification (e.g. self-assembled monolayers), to reduce high adhesion forces at MEMS interfaces is interpreted in light of analytical... K Komvopoulos - 《Wear》 被引量: 610发表: 1996年 Gold-coated mic...
Interplay between counter-surface chemistry and mechanical activation in mechanochemical removal of N-faced GaN surface in humid ambient 2021, Tribology International Citation Excerpt : Actual CMP process is associated with an extremely complicated tribological behavior including the interactions among abrasive...
Now updated-the current state of development of modern surface science Since the publication of the first edition of this book, molecular surface chemistry and catalysis science have developed rapidly and expanded into fields where atomic scale and molecular information were previously not available. Thi...
Nano-lubrication: concept and design The advent of microelectromechanical system ( MEMS ) devices, sensors, actuators, microsystems, and nanotechnology have called to attention the effect of f... SM Hsu - 《Tribology International》 被引量: 269发表: 2003年 Quantum Chemistry Study on the Relationsh...
[Microtechnology and MEMS] Advanced Analytical Methods in Tribology || Electron Microscopy and Microanalysis for Wear Surface Characterization The basic principles of X-ray microanalysis of thin surface films and stratified targets are summarized. The influence of the electron beam accelerating vo... M ...
Understanding and controlling interface friction are central to many science and engineering applications. However, frictional sliding is closely related to adhesion, surface roughness, surface chemistry, mechanical deformation of contact solids, which poses the major challenge to experimental studying and the...
Physical Chemistry Theoretical and Applied Mechanics Surfaces and Interfaces, Thin Films Tribology, Corrosion and Coatings Keywords piezoelectric polymers adhesion micro-electro-mechanical systems (MEMS) AFM friction Industry Sectors IT & Software Electronics Oil, Gas & Geosciences Engineering Aeros...
However, reflectivities of even the Ru-coated mirrors degrade in time during exposure to EUV radiation. Ruthenium surfaces are chemically reactive and are very effective as heterogeneous catalysts. In the present paper we summarize the thermal and radiation-induced surface chemistry of bare Ru ...