Cascade Microtech Part Number: Summit 12000B-AP Description Probe station platform, semi-automated with MicroChamber, AttoGuard and PureLine technology Datasheet Download datasheet for Summit 12000B-AP by Cascade Microtech Download
System Electrical Performance (w/ thermal chuck) Probe leakage * Chuck leakage * (ERS) Thermal controller OFF Thermal controller ON Thermal controller OFF Summit 12000B-AP FemtoGuard Chuck ≤ 1 fA ≤ 5 fA ≤ 2 fA Summit 12000B-M FemtoGuard Chuck ≤ 1 fA ≤ 10 fA ≤ 15 fA ≤ 20 fA...
(w/ thermal chuck) Summit 12000B-AP Summit 12000B-M Summit 12000B-M Summit 12000B-S FemtoGuard Chuck FemtoGuard Chuck Coax Chuck Coax Chuck Probe leakage * Thermal controller OFF ≤ 1 fA ≤ 1 fA ≤ 1 fA ≤ 20 pA Thermal controller ON ≤ 5 fA ≤ 10 fA ≤ 10 fA ≤ 20 pA ...
MEcHAnicAlPERFoRMAncE XYStage(Summ t12000BSem aut mat ) Travel203mmx203mm 8in.x8in. Resolution±1µm 0.04mils Repeatability≤2µm 0.08mils Accuracy≤2.5µm 0.1mils Speed>50mm/sec 2in./sec BearingsPrecisionlinearcross-roller Motor-drivesystem5-phasesteppermotor Feedbacksystem1µmresolution...
5 mm / turn Precision cross-roller SUMMIT www.cascademicrotech.com 2 MICROCHAMBER Electrical (Semi-automated) EMI shielding Spectral noise floor* System AC noise ** Summit 12000B-AP ≥ 20 dB 0.5-3 GHz, ≥ 30 dB 3-20 GHz (typical) ≤ -170 dBVrms/rtHz (≤ 1 MHz) Non thermal ≤ 5...