1、设备名称:STS MULTIPLEX ASE-HRM ICP ETCHER 2、设备品牌:英国STS 3、设备用途:耦合离子刻蚀、深硅刻蚀 4、设备应用领域:半导体、MEMS、光电集成、LED、薄膜电池 5、设备英文介绍: STS MULTIPLEX ASE-HRM ICP ETCHER consisting of: Configuration: - Model: Multiplex ICP - Process Chamber: ASE-HRM - ASE...
Surface Tech Sys (STS) STS MESC Mutiplex ICP Etcher Description:STS MESC Multiplex ICP Plasma etcher, 6″ Load lock system Al chamber Dual chlorine gas and BCL3 Injection of gas mixtures: N2, O2, SF6, (C4F8), CF4, BCl3, Ar, Cl2 and HBr Roughing pump Diffusion pump Turbo molecular ...