HiPIMS also enables better control over ion energy, utilizing the accelerating effect of the bias voltage field on ions, which facilitates tailoring coating properties and the deposition of complex material (such as nitrides and oxides using reactive sputtering or alloys grown with multi-target ...
A high-resolution transmission electron microscopy (HRTEM, JEM-2010F, JEOL, Tokyo, Japan) operated at an accelerating voltage of 200 kV and energy Coatings 2018, 8, 50 3 of 15 dispersive spectroscopy (EDS) on an EDAX DX-4 energy dispersive analyzer were used to characterize the crystallinity...
The morphology of the coatings was analyzed by SEM on a JXA-8230 microscope (JEOL, Tokyo, Japan) at an accelerating voltage of 25 kV and an electron beam current of up to 7 nA. The backscattered electron mode (СОМРО) was used for all sample sections selected for SEM study. The ...
For final polishing of the window, the accelerating voltage was reduced to 5 kV.CToahtinegcs r2o01s8s, -8s, ex cFtOiRonPEaElRTREEMVIEsWamples were then analyzed with a probe corrected FEI Tit4anof T11hemis (Theram3o0 FkiVshGear Siocnienbetiafimc,wWaasltuhsaemd. ,FMorAf,inUalSApo)...