SPIN-DRYING METHOD AND SPIN-DRYERPURPOSE: To obtain a wafer whose surface is free from mist after it is spin- dried.IKEDA RIKIO池田 利喜夫
Define spin drier. spin drier synonyms, spin drier pronunciation, spin drier translation, English dictionary definition of spin drier. Noun 1. spin drier - a clothes dryer that uses centrifugal motion to dry the clothes that are put into it spin dryer cl
PURPOSE: To obtain a wafer whose surface is free from mist after it is spin- dried. ;CONSTITUTION: When a wafer 1 treated with liquid is spin-dried, a spin-dryer is so controlled in number of revolutions as to increase the wafer 1 in number of revolutions from a time before a liquid...
PURPOSE: To provide a spin-drying device, which can rotate a circular substrate at high speed in a state that the substrate is stably spin-dried favorably. ;CONSTITUTION: A plurality of movable pawls 5 are rotatably supported on a rotating board 2 extending from holding action positions for ...
When the clothes are spin-dried and dewatered, the auxiliary motor drives the compression roller through the eccentric mechanism, and the rotary drum can ... 张卫 被引量: 0发表: 2015年 ACCELERATION OF THE DRYING OF LAUNDRY The aim of the invention is to reduce the drying time of laundered...
Crystallographic and electrochemical characteristics of melt-spun Ti-Zr-Ni-Cu alloys Mesoporous Silica Synthesized by Solvent Evaporation: Spun Fibers and Spray-Dried Hollow Spheres Unique nanostructures and enhanced thermoelectric performance of melt-spun BiSbTe alloys...
A spin dryer including a rotary stage (12) for supporting a substrate (1) to be dried, particularly adapted for use in producing semiconductor devices, and a stationary cover (11) spaced from the substrate (1). The stationary cover has a... M Yasunari,O Yuji - US 被引量: 31发表: 19...
The spin dryer also includes a separate section which cleans and dries the end-effector of the robot which inserts the wafer into the spin dryer while the wafer is being dried. 展开 收藏 引用 批量引用 报错 分享 文库来源 其他来源 求助全文 Wafer spin dryer and method of drying a wafer ...
A water content in the substrate is turned into a mist by a synergistic effect due to a centrifugal force, a blowing-off due to the inert gas and a reduced pressure to enable to efficiently remove the water content and the substrate can be completely dried.;COPYRIGHT: (C)2002,JPO 展开 ...
Aqueous suspensions of Au-Ag alloy nanoparticles and their dried films are characterized by UV-Vis spectroscopy, Field Emission-Scanning Electron Microscope (... Y Shin,Bae, In-Tae,BW Arey,... - 《Journal of Physical Chemistry C》 被引量: 178发表: 2008年 Formation of cellulose-based electros...