smif , opener , 自动开盒器 , 刻蚀清洗机 , 片盒洗净机 , 洁净单元 , 手动推片机 全国服务热线(021) 您当前的位置:上海西树电子有限公司» 商铺首页 手机版 公司简介更多 本公司专业研发、生产半导体/液晶清洗/太阳能等配套设备及零部件。主要产品有smif pod 手动/自动开盒器,推片机,wet bench wafer re...
晶圆载具晶圆盒/晶舟盒系列-FOUP / FOSB / Wafer SMIF Pod,可保护、运送、並储存晶圆,在运输傳载及储存时提供安全防护。
晶圓載具晶圓盒/晶舟盒系列-FOUP / FOSB / Wafer SMIF Pod,可保護、運送、並儲存晶圓,在運輸傳載及儲存時提供安全防護。
Adept Technology Announces New SMIF Pod Opener at SEMICON West 2001; Adept SMIF EZ Expands Cleanroom Contamination Product Line.
FOUP,FOSB,Wafer SMIF Pod Able to protect, deliver and store wafer, provide safe protection during delivery and storage.
SMIF Pod Opener.(from Adept Technology Inc.)(Brief Article)
MANUAL SMIF OPENERPROBLEM TO BE SOLVED: To provide an inexpensive manual SMIF opener by which a wafer cassette can be put in and take out of an SMIF pod body without contaminating the SMIF pod body and the wafer cassette and locking and unlocking an SMIF lid.TAMAKI YOSHIYUKI...
A universal SMIF pod interface and wafer cassette transfer apparatus (100) may be configured either as an indexer or as a load port opener. The apparatus includes both a port plate (102) having a central opening (175), and a port door (104) fitting within and sealing the central opening...
(57)< Abstract > It can constitute the general-purpose SMIF pod interface combined use wafer cassette transfer device (100) as an indexer, or as the load port opener. This device when the port plate (102) which has the median opening (175) and, pod does not exist, the Inlaying ball ...
(57)< Abstract > It can constitute the general-purpose SMIF pod interface combined use wafer cassette transfer device (100) as an indexer, or as the load port opener. This device when the port plate (102) which has the median opening (175) and, pod does not exist, the Inlaying ball ...