BTW, I use the results produced in results.final file for all parameters (Vth, Tox, junction depth...etc) Hence, results.final says the following: Code: gateox=20 angstroms (0.002 um) X.val=0.005--->first Tox result gateox=17.7442 angstroms (0.00177442 um) X.val=0.005--->second on...