Silicon tetrachloride (SiCl4) hydrolyses instantly to yield silicic acid, Si(OH)4, but carbon tetrachloride (CCl4) would not undergo hydrolysis. We may say that organosilicon chemistry is, in general, easier to
Silicon precursorDeposition temperature (°C)Growth rales (μm/min) Silicon tetrachloride (SiCl4) 1150–1250 0.4–1.5 Trichlorosilane (SiCl3H) 1000–1150 0.4–4.0 Dichlorosilane (SiH2Cl2) 1020–1120 0.4–3.0 Silane (SiH4) 650–900 0.2–0.3 Disilane (Si2H6) 400–600 <0.1 ...
Silicon tetrachloride is manufactured on a huge scale as a precursor to the production of pure silicon, silicon dioxide, and some silicon esters.[70] The silicon tetrahalides hydrolyse readily in water, unlike the carbon tetrahalides, again because of the larger size of the silicon atom rendering...
“Reaction Process of Vanadium Tetrachloride with Ammonia in the Vapor Phase and Properties of the Vanadium Nitride Formed” Bull. Chem. Soc. Jpn., 55, pp. 3446-3449 (1982). Ellis et al. “Nitrous Oxide (N2O) Processing for Silicon Oxynitride Gate Dielectrics.” IBM Journal of Research ...
In the case of TiNxliners, inorganic ALCVD methodology has focused on the thermal reaction of halide sources of the type tetraiodotitanium (TiI4) and titanium tetrachloride (TiC14) with ammonia (NH3), with zinc (Zn) being used in some experiments as an additional reactant in the case of...
The examples of the organic solvent are cyclic ethers such as tetrahydrofuran and dioxane, aromatic hydrocarbons such as toluene and xylene, halogenated hydrocarbons such as methylene chloride and chloroform and carbon tetrachloride. The preferred example of the organic solvent is methylene chloride. The...