A fixed-beam leaky-wave slot antenna with an air-filled back cavity is proposed in the millimeter-waveband. The antenna is fabricated based on the bulk silicon microelectromechanical systems micromachining technology. This micromachining process can etch silicon wafers and plate them with gold. ...
A similar antenna operating at 0.31 THz was fabricated in a 65 nm CMOS technology and the simulation results are shown in this work.Several novel OCA designs are also presented, including a rectangular cavity backed slot antenna, a substrate integrated waveguide (SIW) slot antenna and an E-...
This letter demonstrates a technique for a folded slot antenna fabricated on low resistive silicon wafer, using pre-etched cavity and Benzocyclobutene (BCB) support membrane. The most distinctive feature of this method is that a cavity is pre-etched before the antenna fabrication process using low-...
Based on the evanescent wave resonance, a photonic crystal sensing structure with air slot-porous silicon-air slot Fabry–Perot cavity (F–P cavity) is proposed. Taking the F–P cavity as the sensing unit, when the gas to be detected is filled into the sensing unit, the refractive index ...
A W-Band High Radiation Efficiency With BCB-Air Cavity-Backed Antenna Based on Through Silicon Ring Trench. IEEE Antennas Wirel. Propag. Lett. 2022, 21, 1955–1959. [Google Scholar] [CrossRef] Disclaimer/Publisher’s Note: The statements, opinions and data contained in all publications are ...
Not given Not given 0.39 × 0.35 0.37 × 0.11 0.37 × 0.11 with d = 0.47λ0 Approach Etching an air cavity Elevating the patch An air cavity with tunable thickness Glass-based Stacked patches CPW-fed slot loop with a stacked patch Forming a BCB-air cavity Stacked patches Stacked patches ...