1. A 1×32 silica-on-silicon-based arrayed waveguide grating is designed and fabricated. 采用高精度光刻版、PECVD材料生长、反应离子刻蚀和端面8°角抛光等技术,设计并研制了1×32硅基二氧化硅阵列波导光栅。更多例句>> 2) SiO2 on Si 硅基二氧化硅 1. 5 dB by using the SiO2 on Silicon substrate ...
网络硅基二氧化硅型 网络释义 1. 硅基二氧化硅型 这种集成平台包括一个硅基二氧化硅型(silica-on-silicon)母板,在此母板上安装各种无源波导器件和InP有源器件,并使之互 … www.fzdelicate.com|基于3个网页 例句
光波导氢氧焰淀积微电子机械系统在硅基上通过氢氧焰淀积的 Si O2 ,厚度达到了 2 0 μm;通过掺 Ge增加芯层的折射率 ,折射率比小于 1% ,并可调 ;用反应离子刻蚀工艺对波导的芯层进行刻蚀 ,刻蚀深度为 6 μm,刻蚀深宽比大于 10 ;波导传输损耗小于0 .6 d B/ cm(λ=1.5 5 μm) ,并对波导的损耗机理...
Silica-on-silicon ( SiO 2 / Si) appears the most promising materials system for integrated optics yet developed. It has the following major advantages over previously-developed and competing technologies (namely Ag — Na ion-exchanged glass, Ti: LiNbO 3 , GaAlAs / GaAs andlnGaAsP/InP): —...
g scattering method Evaluation of the silica-on-silicon optical waveguide quality using scattering methodEvaluation of the silica-on-silicon optical waveguide quality using scattering methodPäivi HeimalaPeter RåbackJaakko Aarnio
摘要: Publication » Silica-on-silicon high rejection filters using organic-inorganic hybrids.会议名称: MRS Spring meetingMRS Spring meeting 会议时间: 2011/01/01 收藏 引用 批量引用 报错 分享 全部来源 求助全文 ResearchGate 相似文献Synthesis of Silicon Carbide Fibers by Sol-Gel Processing ...
Silica-on-silicon erbium-doped waveguide amplifiers (EDWAs) fabricated by the sol-gel route are demonstrated. The preparation of stable sols is first described, with emphasis on identifying chemical routes that allow the incorporation of sufficient concentration of erbium without precipitation or gelation...
Supporting Online Material for Silica-on-Silicon Waveguide Quantum CircuitsPoliti, AlbertoCryan, Martin JRarity, John GYu, SiyuanO'Brien, Jeremy LA. Politi, M. J. Cryan, J. G. Rarity, S. Yu, and J. L. O'Brien, "Silica-on-Silicon Waveguide Quantum Circuits," Science 320, 646-649 (...
To solve the problem with the mid-IR ChG-on-silicon slot-waveguide sensor, a mid-IR suspended ChG/silica-on-silicon waveguide sensor is proposed and its 3D diagram is shown in Fig. 2(a). ChG is used as the core material for low waveguide loss in the mid-infrared. Silica is used as...
In this letter, we propose a simple method to fabricate V-grooves integrated on silica-on-silicon chips. We have utilized the photolithographic self-alignment principle to form the etching mask for V-grooves during waveguide core etching. With such designed processes, the waveguides and V-grooves...