FIGS. 3A and 3B are cross section schematics of a temperature controlled showerhead in accordance with an embodiment of the present invention. FIG. 4 is a schematic of a cooling system in accordance with an embodiment of the present invention. FIG. 5 is a schematic of a temperature control ...
the cooling system may serve to cool the showerheads for more than one semiconductor processing tool. If each semiconductor processing tool has one multi-station chamber with four stations each, a