1 L. Reimer: Image Formation in Low-Voltage Scanning Electron Microscopy (SPIE, Bellingham 1993)2 I. Müllerová, L. Frank: Scanning low-energy electron microscopy, Adv. Imaging Electron Phys. (2003)3 D.C. Bell, N. Erdman: Low Voltage Electron Microscopy: Principles and Applications (Wiley,...
Major Components Figure1provides a schematic diagram of an SEM, including the electron source (also called electron gun or electron emitter), condenser lenses, scan coils, and detectors. A high vacuum is required to operate an SEM. A brief description for each of the major components is present...
Since the introduction of electron microscopes in the 1930s, scanning electron microscopy (SEM) has developed into a critical tool within many research fields, spanning everything from materials science andlife sciencesto forensics and industrial manufacturing. ...
1 L. Reimer: Image Formation in Low-Voltage Scanning Electron Microscopy (SPIE, Bellingham 1993) 2 I. Müllerová, L. Frank: Scanning low-energy electron microscopy, Adv. Imaging Electron Phys. (2003) 3 D.C. Bell, N. Erdman: Low Voltage Electron Microscopy: Principles and Applications (Wil...
When microscopic information about the surface or near-surface region of a specimen is needed, scanning electron microscopy becomes a necessary tool. For that reason, the method finds applications in nearly every branch of science, technology, and industry. ...
2 L. Reimer: Scanning electron microscopy—Present state and trends, Scanning 1, 3 (1978)3 J. Goldstein, H. Yakowitz: Practical Scanning Electron Microscopy (Plenum, New York 1975) 与此同时,扫描电镜被广泛应用于不同领域,如表面成像、通过电子背向散射衍射(EBSD)对多晶材料进行局部区域的晶体学表征...
When the SEM tool is equipped with an Energy Dispersive Spectrometer (EDS), it can also be used to provide micro (region) material analysis of the sample surface. This includes qualitative, semi-qualitative element analysis and specific regional analysis of point, line scan & mapping. ...
Generally, the instrument works in a high vacuum system (~10 4 torr), and image formation (in raster scan pattern) occurs due to electron鈥搈atter interaction. The pattern obtained in SEM is 3-dimensional with an extensive magnification range. Sample preparation plays a vital role in revealing...
1、光学显微镜光学显微镜和透射电子显微镜和透射电子显微镜(TEMTEM)(TransmisionTransmision ElectronicElectronic MicroscopyMicroscopy)光路图比较光路图比较光源中间象物镜试样聚光镜目镜毛玻璃电子枪聚光镜试样物镜中间象投影镜观察屏照相底板照相底板扫描电子显微镜(SEM)Scanning Electron Microscope各种信号成像的分辨率(nm) 扫...
Instruments公司在1965年制造的MarkI“Steroscan”。•1978年做出了第一台具有可变压强的商业制造的扫描电镜 现状 •目前扫描电镜的发展方向是采用场发射枪的高分辨扫描电镜和可变压强的环境扫描电镜（也称可变压扫描电镜）。•目前的高分辨扫描电镜可以达到1-2纳米，部分高端高分辨扫描电镜已具有0.4纳米的分辨率。...