最后用探测器(Detector)收集这些电子信号,然后电脑将这些模拟信号调制转换成数字信号,根据样品上不同点的电子信号强度对应相应的电压,最后得到不同亮度的像素点,这也就是为啥电镜图片都是灰白图像,当扫描线圈将电子束流扫完我们需要的区域,得到完整的像素点,imaging就这样完成了。 图3 SEM 图片 2. 气体注入系统—GIS...
Type I imaging in SE signal mode provides contrast from signal electrons which have a small escape depth and an exit area diameter similar to the probe diameter. Such contrast provides the maximum topographic resolution for high-performance microscopes.
一. 观察表面形貌分析和元素分布 1. SEM分析成像模式 1)表面形貌:SEM(Scanning electron microscope)成像模式,利用次级电子来观察样品的表面形貌和特征。SE图像能够提供非常丰富的图像细节与信息,如材料表面形貌(如裂纹、孔洞、腐蚀、形变等信息)、微观峰谷结构、颗粒分布、晶体结构等等,是常用的表面形貌和形态分析方式。
SEM imaging and EDS elemental analysis Even though scanning electron microscopy (SEM) has made tremendous advances, it can be considered by new users to be a complicated technique. Sample preparation, alignments, cost of ownership, and difficulties with analytical techniques prevent widespread ...
for imaging and slicing without any coating. Filter inspection Used filter from a vacuum cleaner filled with dust particles. From left to right: 1) SEM image of the filter surface in SE mode. The other three images show the results of Micro-CT reconstruction where the filter material is show...
Advanced mode: adjustable range between 4.8 kV and 20.5 kV imaging mode Vacuum modes High vacuum mode Charge reduction mode via optional low vacuum sample holder Detector Backscattered electron detector (standard) Energy dispersive X-ray spectroscopy detector (optional) Secondary electron det...
FIG. 1. Specimen positioning on 12.5 and 26 mm holders. (Diagram taken from JEOL’s manual.)If your specimen needs to protrude above the cylinder’s top face (or the top face of another holder), you can still use this holder, but you need to estimate (with approx. 1 mm accuracy) ...
SEM使用方法 5. Scanning Electron Microscopy
FF模式下可实现高精度加工终点检测(Timesharing Mode) 2. 高通量加工 可通过高电流密度FIB实现快速加工(最大束流100nA) 用户可根据自身需求设定加工步骤 3. Micro Sampling System*3 运用ACE技术(加工位置调整)抑制Curtaining效应 控制离子束的入射角度,制备厚度均匀的薄膜样品 ...
For most secondary electron (SE) imaging choose low current (LC) mode with levels 1- 10 (6-7 typical). The objective lens (OL) aperture should be set to #4. b. For analytical work, especially when using wavelength dispersive spectroscopy (WDS), choose high current (HC) mode with ...