Before a SECS-II message can be sent, the layout must be encoded. Each data item in the message layout is encoded and becomes part of the Data Structure. This is repeated until all the data items in the layout are encoded. The Data Structure is subsequently sent via the SECS-I protocol...
HSMS defines a circuit assurance mechanism called Link Test. The protocol layer has a timer that is started if there are no active message exchanges. Every time the timer expires, a protocol message is exchanged to ensure the connection is still open. Security HSMS defines no security. There i...
符合 SECS/GEM 标准的设备可以使用 TCP/IP（使用 SEMI 标准 E37 和 E37.1 – HSMS）或 RS-232（使用 SEMI 标准 E4 – SECS-I）与晶圆厂主机进行通信。SECS/GEM 标准如何实现 1. 通讯 通信定义了设备在与主机是否存在通信链路方面的行为。它还制定了在 S1F13/S1F14 被切断时如何建立或恢复与 S1F13/S1...
edge integration gem - secs - hsms 指南说明书 A Guide to Understanding GEM - SECS - HSMS March 24, 2004 Version 1.1
1. HSMS标准是TCP/IP通讯规范,也就是网口通讯。 2. SECS-II是双方交互的数据格式,规范双方沟通的语言,就像指定双方用中文还是英文交流。 3. GEM 是半导体通讯设备和主机的对接流程规范。 协议: Internet Protocol Address(IP Address) —— 唯一标识TCP/IP网络的特定设备的逻辑地址。
Transport Protocol Standards – E4/E37 The Transport Protocol Standards define how SECS/GEM messages are transferred between the host and equipment.SEMI E4 defines a serial-based communication connection. SEMI E37 High-Speed SECS Message Services(HSMS)defines a TCP/IP based Ethernet connection. ...
1. HSMS标准是TCP/IP通讯规范，也就是网口通讯。2. SECS-II是双方交互的数据格式，规范双方沟通的语言...
HSMS Protocol Stack The SEMI E4 standard, SEMI Equipment Communications Standard 1 Message transfer (SECS-I), defines a mechanism for exchanging SECS messages over RS-232. This is normally used for older equipment or for some hardware inside an equipment such as an EFEM controller. ...
SECS/GEM属于semi标准的其中一部分,主要包括协议E4、E5、E30、E37。 SECS/GEM首发年份 SECS/GEM最早是使用R232串口通讯(SECS-I标准),直到到1992年发布TCP/IP通讯(HSMS标准)。如今新设备支持SECS/GEM都采用TCP/IP网口通讯(HSMS标准)。
host. Fab host is a software application that is controlling and monitors equipment processing using SECS/GEM protocol. SECS/GEM compliant equipment can communicate with the fab host using either TCP/IP (using SEMI standards E37 and E37.1 – HSMS) or RS-232 (using SEMI standard E4 – SECS-...