Recently some companies are now stating their leak rates in “cc/m” but meaning “acc/m,” actual cubic centimeters per minute (which is volume of flow at the measurement pressure.) The use of “cc/m” is now confusing. It is like stating “psi” versus “psig” or “psia” or “...
Figure 3 is a vacuum chamber pressure is set to 1.4 Pa, cleaning time is set to 15 Min, and argon gas flow rate is set to 30 SCCM, different sputtering power washing effects compare. 翻译结果5复制译文编辑译文朗读译文返回顶部 Figure 3 is the vacuum chamber intensity of pressure supposes ...