网络释义 1. 标线片载物台 载片台,slide... ... ) microscope stage 显微镜载片台 )reticle stage标线片载物台) film board 片台 ... www.dictall.com|基于16个网页 2. 掩膜板工作台 ...性能指标里,硅片工作台(Wafer Stage)和掩膜板工作台(Reticle Stage)之间的同步精度(Synchroniza
PROBLEM TO BE SOLVED: To solve a problem that conductivity failure and short-circuit failure are generated in a semiconductor device by providing a reticle and a structure of reticle stage suitable for reducing the problem that reticle is distorted due to a fine foreign material which does not ...
nikon光刻机reticle stage电机Tomax TC214005G BLG1 29.6 MKS649B0C121T21CAVR压力流量控制器 尼康NIKON光刻机CPCR-0101-NQIC带质保电源现货供应 HELIX REMOTE DISPLAY MODUIE CTI BROOKS远程显示器模块控制CT8 日本Horiba流量计SEC-310N湿法pecvd刻蚀MKS流量计640A-14312 松下电机Panasonic MFA030HA2NSK光刻...
型号:I11/I12 RETICLE STAGE X/Y/T 驱动马达motor TC-214005G 类型:I11/I12 RETICLE STAGE X/Y/T 驱动马达motor TC-214005G 额定电流:0.006A 我司是faulhaber mini motor 专业经销商,我司马达均为原厂直接进口,特别是NIKON stepper机台上使用的比例马达,我司均可以提供,且具有很高的性价比,欢迎咨询选购。
The methods introduced above mainly focus on the control structure and algorithm of the synchronization of the wafer and the reticle stage. However, synchronization error also plays a relatively important role in scanner. Therefore we invent a synchronization control method based on the analysis of th...
求翻译:Observe the reticle lift-off from the Reticle stage是什么意思?待解决 悬赏分:1 - 离问题结束还有 Observe the reticle lift-off from the Reticle stage问题补充:匿名 2013-05-23 12:21:38 观察光罩剥离从掩模版台 匿名 2013-05-23 12:23:18 观察从调制盘阶段的调制盘离地升空 匿名 20...
PURPOSE: A reticle stage is provided to allow a substrate to be aligned to the reticle under it by supporting a moving stage to be movable.;CONSTITUTION: In a reticle stage, a movable stage is formed on an opening inside it and a reticle is formed on the top of the movable stage. A...
EXPOSURE METHOD, PHOTO MASK AND RETICLE STAGE PROBLEM TO BE SOLVED: To provide an exposure method by which a pattern dimension in a wafer surface is stabilized and a wafer is exposed at a high throughput.;SOLUTION: A product region Ax for exposing a center portion 91 of a wafer 8 an.....
网络释义 1. 参考标志 ...组的镜筒上主要功能 为承载光罩、将光罩与光罩平台上参考标志(reticle stage reference mark)对准。 www.docin.com|基于2个网页
reticle stage onto the wafer stage. The projected image has the same image orientation as the image from the reticle stage. In other words, the catadioptric exposure optics does not perform image flip. The reticle stage lies on a first plane and the wafer stage lies on a second plane, ...