Such a complex dependence of pumping speed can explain the speed of experimental results and their rough agreement with theoretical calculations.doi:10.1016/0042-207X(88)90439-3M. AudiElsevier LtdVacuumM. Audi, Pumping speed of sputter ion pumps, Vacuum 38 (8-10), (1988) pp. 669....
In the macroscale, several mechanisms have been used, including thermal transpiration (Knudsen pump), ion capturing using chemisorption (electrostatic ion pump (ESP)), physisorption (sputter ion pump (SIP)), and particle implantation on pumping surfaces (getter pump). In the microdomain, only ...
“Pumping of Helium and Hydrogen by Sputter-Ion Pumps. II. Hydrogen Pumping”, by K. L. Welch et al. published in J. Vac. Sci. Technol. A, American Vacuum Society, 1994, page 861. The generation of hydrogen and other undesired gaseous species results in the presence of a collimated ...
Sputter-Ion PumpsSynchrotron Radiation SourcesDesignMagnetic FieldsPumpingTo optimize the design of a distributed ion pump (DIP) for the Superconducting X-Ray Lithography Source (SXLS) the stability of the rotating electron cloud at very high magnetic field beyond transition, must be re-examined. In...
Sputter-Ion PumpsSynchrotron Radiation SourcesX ray lithographyTo optimize the design of a distributed ion pump (DIP) for the Superconducting X-Ray Lithography Source (SXLS) the stability of the rotating electron cloud at very high magnetic field beyond transition, must be re-examined. In this ...
The present invention concerns a vacuum pumping system comprising a plurality of sputter ion pumps and having an overall axial size and a weight that are considerably reduced with respect to known pumping systems. According to the invention, said pumping system (PS; PS') comprises a plurality of...
PROBLEM TO BE SOLVED: To provide a vacuum pumping system equipped with a plurality of sputter ion pumps wherein the whole axial direction dimension and weight are remarkably reduced rather than a well-known pumping system.MURA MICHELEミケーレ ムーラ...
Clean High Vacuum Pumps The first breakthrough in oil-free high vacuum pumping came with the development of ion-getter pumps (or sputter-ion pumps). This gave rise to a new ultrahigh vacuum technology with stainless steel chambers, all-metal gaskets, high-...
39. national symposium of the American Vacuum Society, Chicago, IL (United States), 9-13 Nov 1992Welch, K.M., Pate, DJ., Todd, R., Vitkun, K., "The Pumping of Hydrogen and Helium by Sputter-Ion Pumps", Invited Paper, 39th National AVS Symposium, Chicago, 111., November 1992....
The pressure dependence of the pumping speed of sputter ion pumpsNot Availabledoi:10.1016/S0042-207X(69)80005-9András DallosElsevier LtdVacuumA. Dallos, “ The pressure dependence of the pumping speed of sputter ion pump”, Vacuum 19 , pp. 79–80 (1969)....