Chrisey, Pulsed laser deposition of high-quality NbN thin films, Appl. Phys. Lett. 65 (1994) 2860e2862.Treece R E,Horwitz J S,Claassen J H.Pulsed laser deposition of high-quality NbN thin films.Applied Physics Letters. 1994Treeee R E ,H orwJtz J S,Claassen J H , et a1. Pulsed...
NASICON thin filmsSiO 2/Si substratesdeposition ratesXPSthin film compositionWe have deposited NASICON ( Na Super Ionic CONductor) films of thicknesses ranging from 100 to 600 nm, by Pulsed Laser Deposition (PLD), on SiO /Si substrates. The deposition rates varied from 6 脳 10 to 0.08 nm/...
The pulsed laser thin‐film deposition process can enable preparation of thin films of complex composition with good control over the film stoichiometry. T... T Venkatesan,XD Wu,A Inam,... - 《Applied Physics Letters》 被引量: 521发表: 1988年 Pulsed laser deposition and characterization of...
oxide filmsfilm homogeneityoptical properties/ A6855 Thin film growth, structure, and epitaxy A8115I Pulsed laser deposition A0130R Reviews and tutorial papersPulsed laser deposition is a recently developed technique which is producing very good results for the growth of complex compound films. This ...
We have studied in detail the physical phenomena involved in the interaction of high-powered nanosecond excimer-laser pulses with bulk targets resulting in evaporation, plasma formation, and subsequent deposition of thin films. A theoretical model for simulating these laser-plasma--solid interactions has...
Pulsed laser deposition (PLD) with nanosecond pulses has been used for growing ultrathin Fe films on Cu(1 0 0) and Cu(1 1 1) single crystal surfaces. We have studied the morphology as well as the crystallographic structure of these films by scanning tunneling microscopy, and we compare the...
Pulsed laser deposition (PLD) is a unique method to obtain epitaxial multi-component oxide films. Highly stoichiometric, nearly single crystal-like materials in the form of films can be made by PLD. Oxides which are synthesized at high oxygen pressure can be made into films at low oxygen parti...
- 《Journal of Applied Physics》 被引量: 202发表: 1994年 Characterization of ion-assisted pulsed laser deposited cubic boron nitride films Cubic boron nitride films were deposited by pulsed laser deposition from a boron nitride and a boron target using a KrF-excimer laser, where the growing fi...
1.3.8Pulsed laser deposition Thepulsed laser deposition(PLD) is basically aphysical vapor deposition(PVD) technique for the formation ofthin filmswhere a high-power pulsed laser beam is focused inside an UHV chamber to strike the surface of the solid target material that it is to be deposited...
Narayan, "Pulsed laser evaporation technique for deposition of thin films: Physics and theoretical model," Phys. Rev. B:, Vol. 41, No. 13, pp. ... QY Ying,DT Shaw,HS Kwok - 《Applied Physics Letters》 被引量: 119发表: 1988年 Pulsed laser evaporation: equation-of-state effects Theoret...