vacuum pulling method, the concave groove (7) and the vacuum chamber (14) on the substrate stage (6) are evacuated by a vacuum pulling system, and the vacuum value of the concave groove (7) is always set to be less than or equal to the vacuum value of the vacuum chamber (14), ...
the suction head holds the load, the internal pulling the load due to the contraction of the hose due to negative pressure, while the negative pressure is present, when the load is dropped, the shock valve (6), a vacuum is intended to prevent arbitrary movement of the hose pulling apparatu...