accurately in situ, a fast and efficient methodology has been used with a multistation, which allows the measurement by laser scanner and positioning at all times in the same coordinate system established through a traverse or ... JR Torres,GV Arenas,JG León 被引量: 0发表: 2019年 Unit and...
High-speed serial-kinematic SPM scanner: design and drive considerations This paper describes the design of a flexure-guided, two-axis nanopositioner (scanner) driven by piezoelectric stack actuators. The scanner is specifically... KK Leang,AJ Fleming - 《Asian Journal of Control》 被引量: 190发...