7. By inverting Equation (2), the Zernike aberration coefficients can be calculated from the measured data. [0068] Confirmation of the usefulness of the technique of the present invention is illustrated in FIG. 8. For a specific projection system of a lithographic projection apparatus operated ...
Instead, as the dip value ranges between 0 and 90, just one of its sine and cosine values is sufficient (Equation (4)). The maximum value for the azimuth threshold (t1) is 2, while for the inclination threshold (t2) it is 1, as the sine function ranges between −1 and 1 for ...
The projection-based method is used to generate the N equations based on the diffusion equation. The optimized basis function is constructed in three steps: (i) definition of elementary basis functions, e.g., even-order monomials, (ii) orthonormalization of elementary basis function to ensure ...
After the five equations are solved (Equation (13a–e)) simultaneously, the phase at each measurement point can be calculated as an arctangent of a function of the intensities measured at the same measurement point at each phase shifting: ϕ(i, j) = tan−1 2(I2 − I4) 2 I3 ...