There are many published papers that Polymer bound PAG(PBP) type resists show good performance, especially in view of line width roughness (LWR). Many resist researchers say that the acid diffusion is absolutely controlled and slow because the PAG of polymer bound type resist is covalent bonded ...
AlgorithmLower boundUpper bound Treatement water salinity ALO 3.721 ↑ 3.042 ↓ GA 3.590 ↑ 2.702 ↓ GWO 5.600 ↑ 4.179 ↓ MVO 5.594 ↑ 4.236 ↓ PSO 5.601 ↑ 4.295 ↓ − without change ↑ increase of NPV ↓ decline of NPV Up to 10% difference between oil saturation in layers 3 and ...
Upon protein adsorption, a reduction in Gibbs free energy is achieved by displacing the surface-bound water molecules, therewith decreasing the solvent-exposed area [47], [49], [52], [64]. Additionally, moving water molecules surrounding the hydrophobic groups of the protein towards the bulk ...
While not wishing to be bound by theory, it seems that polymerization of B1 and B2 using a nickel catalyst as compared to the use of a palladium catalyst for the polymerization of B4, B4a and B4b is the likely cause of this DR difference. Further, as one looks at several NBPhOH/NB(...
In the polymer compound according to the current embodiment of the invention, the repeating unit of formula (5), the repeating unit of formula (6) and the repeating unit of formula (7) may be randomly bound to form a block copolymer, a random copolymer, a graft copolymer or the like. ...
The resolution of the polymer bound PAG type resist reaches 17.5nmhp with 35nm thickness and there is possibility that the resolution of an optimized polymer bound PAG type resist reaches under 15nmhp. The resolution of the resist with lower capillary force (C.F.) given and lower swelling ...
Most notably for the polymer bound PAG system under study the model provides an extremely low acid diffusion length (∼8 nm), suggesting an excellent inherent resolution for this material. Next, resist models are created for a series of sensitizer containing polymer bound PAG formulations, where...
monomeric peptides with a labile protecting group (v) and acid step, washing the solid matrix in an organic solvent, or (iv) an alkaline solution, to remove the polymeric photoacid generator remaining It is produced by repeating the steps of (v) above from (ii) and step, is bound to ...
The Polymer-bound PAG approach achieves 24nm half pitch resolution with an LWR of 3.8nm and a photospeed of 11mJ. The Polymeric PAG approach also possesses higher exposure latitude vs a PAG blend resist. Although still maturing, it is felt that polymer-bound PAG-based resists will become ...
However, the detailed structure-property relationships that result from this direct attachment of the PAG functional group to the polymer have previously not yet been rigorously characterized. In this work, the lithographic properties of a polymer-bound PAG CAR (GBLMA-co-EAMA-co-F4-MBS.TPS) and...