b. Plasma enhanced CVD of a) Cu, b) Au, c) Pd: E. Feurer, H. Suhr: Appl. Phys. A 44 , 171–175 (1987)US4692343 May 12, 1986 Sep 8, 1987 Spectrum Cvd, Inc. Plasma enhanced CVDUS4692343 1986年5月12日 1987年9月8日 Spectrum Cvd, Inc. Chemical vapor deposition...
High-Performance Plasma Enhanced Chemical Vapor Deposition System for Thin Film Deposition & the Growth of CNFs & CNTs
doi:10.1002/cvde.200590021M. L. HitchmanJohn Wiley & Sons, Ltd.Chemical Vapor DepositionHitchman, M.L. Special Issue: Atmospheric Pressure Plasma Enhanced CVD (AP-PECVD). Chem. Vap. Deposition. 2005, 11 (11-12), 451-530.
All you need to know about Plasma Enhanced Chemical Vapor Deposition (PECVD), the hybrid CVD process to deposite high quality thin films at low temperature
plasma enhanced CVDgas phase reactants/ A8115H Chemical vapour depositionThis paper distinguishes between two different approaches to PECVD: (a) DIRECT PECVD in which: (a) all of the gas phase reactants are simultaneously plasma excited; and (b) the substrate is immersed in the plasma; and...
1. 电浆增强化学气相沈积法 在电浆增强化学气相沈积法(plasma-enhanced CVD)中,反应气体在电 磁场中获得能量,各种化学反应在电浆体中 迅速地 … www.tw100s.com|基于5个网页 2. 等离子体增强化学气相淀积 B#a&G,P4i k-` }-_等离子体增强化学气相淀积(plasma-enhanced CVD):一种通过等离子体能量 来进行淀...
In this work, we present recipes for a direct growth of graphene on Ge via thermal chemical vapor deposition (TCVD) and plasma-enhanced chemical vapor deposition (PECVD). We demonstrate that the growth temperature can be reduced by about 200 °C in PECVD with respect to TCVD, where usually...
Moreover, the versatility of plasma technology is shown by the fact that it is used in combination with or as part of other techniques such as magnetron sputtering PVD, plasma enhanced CVD and plasma-induced grafting. View chapter Book 2011, Functional Textiles for Improved Performance, Protection...
专利名称：PLASMA ENHANCED CVD SYSTEM AND PLASMA ENHANCED CVD FILM DEPOSITING METHOD 发明人：MATSUSE MITSUTAKA,松瀬 充 貴,SHINOHARA HISATO,篠原 久人 申请号：JP特願2000-94488(P2000-94488)申请日：20000330 公开号：JP特開2001-279449(P2001-279449A)A 公开日：20011010 专利内容由知识产权出版社提供 专...
V.B Plasma-Enhanced CVD A plasma is a gas in which a portion of the atoms or molecules is dissociated into positively charged ions and electrons. Charged, mobile species are then present along with neutral species. The excitation that produces a plasma requires energy, usually in the form of...