PAS 2000采用了油压驱动的晶圆台,提供了高速曝光和吞吐量,能够实现1.0至1.3微米的线宽控制,叠加精度达到0.25微米。然而,由于油压驱动的局限性,PAS 2000在市场上并未取得预期的成功。 随后,ASML开发了采用电动晶圆台的PAS 2500光刻机,取得了更大的市场认可。晶圆步进式光刻机(Stepper)是早期半导体制造中用于转移光刻掩...
飞利浦自动步进机 (PAS:Philips Automated Stepper) 2000 从这些研究原型中诞生。 1980年5月SIRE II原型机照片 在飞利浦研究中心,飞利浦的部门主要专注于基础研究,晶圆步进机有点反常。市场需求日益带动企业研发,工程制造装备应用较多。从 1978 年起,飞利浦科学与工业 (S&I) 部门以 PAS2000 的名义推动了商业化工作。
And so, the system that started at Micron and then had a second life at another customer was refurbished and upgraded to a PAS 5500/275 – a model for which Ted helped to write the original specifications. It is still an i-line stepper, but now offers resolutions down to 0.28 µm an...
美国`Elwood `STEPPER MOTOR M21-诺迪23D-6102FC EPN--00诺迪0-7951 `Dynex Hydraulics`液压泵配件60,70-346诺迪2 9032 (IF96111), 6070-诺迪3462 美国`Teledyne`继电器712D-12 视觉设备IPD VISION APPLIANCE S4584028 VA31-H VA31H 美国`CORECO imaging`DALSA CORECO`Teledyne`DALSA`Teledyne DALSA`图像采集...
ASML PAS 2500 5000 STEPPER BAR CODE READER 4022.430.0023 Applied Materials / ASML ROBOT PART ASML 4022.436.1445.1 Haake 337-4003 TCU Controller Chiller 914902 ASML SCANNER CHUCK 8" 200mm N-195.7 (continuous Vacuum) ASML 4022.472.42562 Laser Head / 55mW, 532nm SANKYO Robot Controller ...
LAM 280473 PCB-STEPPER CPU CARD W/RAM LAM 286-000751-1 CABLE LAM 2895048 O-RING W/ ASSY LAM 290-022890-001 SPACER PC SNAP MOUNT (PACK OF 10) LAM 2GN120K MOTOR LAM 30-0007-030 FTG,1/8T x 1/4T , TFE LAM 30-0028-060 FTG,REDUCER 1/8"TX1/4"PORT LAM 3000224 LAMP-UVP MERCURY...
Customized Molex 501646-2000 2.0mm Interface Extension Wiring Harness for Speed Regulator Reducer Motor US$0.10-5.00 / PCS Customized 4pin to 6pin DuPont Terminal Wiring Harness for Printer 42 Stepper Motor US$0.10-5.00 / PCS Jst Pa...