飞利浦自动步进机 (PAS:Philips Automated Stepper) 2000 从这些研究原型中诞生。 1980年5月SIRE II原型机照片 在飞利浦研究中心,飞利浦的部门主要专注于基础研究,晶圆步进机有点反常。市场需求日益带动企业研发,工程制造装备应用较多。从 1978 年起,飞利浦科学与工业 (S&I) 部门以 PAS2000 的名义推动了商业化工作。
ASML PAS 5500 / 200 Stepper. 0 请求价格 ASML SERV.435.04051 Pre-load unit-z assy. 0 请求价格 ASML SERV.437.83841 Lamp HAL 12 V / 100 W. 0 请求价格 ASML SERV.435.04171 Roller bearing. 0 请求价格 你想卖同样的东西吗? 提交出售
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And so, the system that started at Micron and then had a second life at another customer was refurbished and upgraded to a PAS 5500/275 – a model for which Ted helped to write the original specifications. It is still an i-line stepper, but now offers resolutions down to 0.28 µm an...
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