Miyauchi, Hironaga (Chuo-ku, Tokyo, JP) Application Number: 10/544654 Publication Date: 09/14/2006 Filing Date: 02/06/2004 Export Citation: Click for automatic bibliography generation Assignee: Mitsui Chemicals, INC. (Minato-ku, JP)
The design concept and hardware configuration of the SRTF system are described. The temperature measurement/control techniques and thermal characteristics of theWaferMastersSan JoseTokyo Electron LimitedMinato-kuWoo Sik YooRyuichi Komatsubara