This paper describes the development of MEMS force sensors constructed using paper as the structural material. The working principle on which these paper-based sensors are based is the piezoresistive effect generated by conductive materials patterned on a paper substrate. The device is inexpensive (...
M. Paper-based piezoresistive MEMS sensors. Lab Chip 11, 2189–2196 (2011). Article CAS Google Scholar Mirica, K. A., Weis, J. G., Schnorr, J. M., Esser, B. & Swager, T. M. Mechanical Drawing of Gas Sensors on Paper. Angew. Chem. Int. Ed. 51, 10740–10745 (2012). ...
M. Paper-based piezoresistive MEMS sensors. Lab Chip 11, 2189–2196 (2011). Article CAS PubMed Google Scholar Liu, H. et al. Flexible and Degradable Paper-Based Strain Sensor with Low Cost. ACS Sustain. Chem. Eng. 5, 10538–10543 (2017). Article CAS Google Scholar Liao, X. et ...
In this paper a silicon head slider suspension with integrated piezoresistive friction force sensors is presented. This device can be used for tribological... JF Burger,GJ Burger,TSJ Lammerink,... - IEEE International Workshop on Micro Electro Mechanical Systems 被引量: 2发表: 2017年 加载更多...
文档标签: ID id Paper Title paper title and PAPER IEEE NEMS 系统标签: nems title paper nano poster session PaperIDSessionIDSessionNameTitleAuthorsContactAffiliation2Postersession#3-2Nano/MicroSensorsandActuatorsResearchofMeso-PiezoresistiveEffectMicromachinedGyroscopeJunLiu,KangDu,RuirongWang,andYunboShiScienc...
A sensor wafer includes the microphone made of a MEMS mechanical diaphragm and nanometric piezoresistive gauges together with capillaries and fluidic ports. The second wafer, a cap wafer, includes the PA cell, the expansion volume, SiGe waveguides guiding the light into the PA cell, and electric ...
due to the hydrophobicity of the piezoresistive sensor, the sensor can be applied in a wet environment or under water, which greatly reduces the influence of environmental humidity on the sensor. It is expected that such fully paper-based piezoresistive sensors with high sensitivity, low working vo...
Paper-based piezoresistive mems sensors. Lab Chip 2011, 11, 2189–2196. [CrossRef] [PubMed] 8. Ren, T.L.; Tian, H.; Xie, D.; Yang, Y. Flexible graphite-on-paper piezoresistive sensors. Sensors 2012, 12, 6685–6694. [CrossRef] [PubMed] 9. Li, X.; Zwanenburg, P.; Liu, X....
Paper-based piezoresistive MEMS sensors. Lab Chip 2011, 11, 2189–2196. [Google Scholar] [CrossRef] [Green Version] Ahmed, S.; Bui, M.-P.N.; Abbas, A. Paper-based chemical and biological sensors: Engineering aspects. Biosens. Bioelectron. 2016, 77, 249–263. [Google Scholar] [Cross...
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