6 NATURE COMMUNICATIONS | 7:10644 | DOI: 10.1038/ncomms10644 | www.nature.com/naturecommunications NATURE COMMUNICATIONS | DOI: 10.1038/ncomms10644 ARTICLE Device-patterning was performed with optical lithography and ion milling, followed by a 14-nm-thick AlOx refill. Subsequently, 5 nm ruthenium...