Bruning, “Reduction imaging at 14 nm using multilayer-coated optics: Printing of features smaller than 0.1 μm”, J. Vac. Sci. Technol. B8, 1509–1513 (1990). Article Google Scholar V. Bakshi, EUV Lithography 178, SPIE Press, 2009. D. Attwood, Soft X-rays And Extreme Ultraviolet ...